{"id":6177,"date":"2026-01-29T22:09:49","date_gmt":"2026-01-29T13:09:49","guid":{"rendered":"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?p=6177"},"modified":"2026-04-18T12:23:51","modified_gmt":"2026-04-18T03:23:51","slug":"presentation-tajiri-improvement-technique-for-power-efficiency-of-dab-dc-dc-converters-by-reducing-hard-switching-and-copper-losses-in-light-loads-mar-23-2023-ieee-psma-ieee-applied-power-e-3-2-3-2-3","status":"publish","type":"post","link":"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?p=6177","title":{"rendered":"Presentation: Kobayashi (on behalf of\u3000Kawazu) &#8220;D31.2 &#8211; RF Triangular Wave Pulse Power Supply Circuit for Plasma Etching Equipment&#8221;, Mar. 26, 2026 in IEEE Applied Power Electronics Conference 2026 @San Antonio, Texas, USA"},"content":{"rendered":"\n<p class=\"has-black-background-color has-background\"><a data-type=\"URL\" data-id=\"https:\/\/apec-conf.org\" href=\"https:\/\/apec-conf.org\" target=\"_blank\" rel=\"noreferrer noopener\">The Applied Power Electronics Conference (APEC) 2026<\/a><\/p>\n\n\n\n<p>This paper proposes a practical circuit topology and con-trol method for a high-frequency power supply used in plasma etching systems. As semiconductor device dimen-sions continue to shrink, highly precise etching technolo-gy is required, and control of the ion energy distribution has become increasingly important. In particular, the temporal slope of the power-supply voltage waveform significantly affects the ion energy density. Therefore, this study focuses on improving the ion energy density by employing a negative-polarity triangular waveform as the power-supply voltage. Conventional studies use power amplifiers, but these may suffer from low efficiency. Therefore, we propose a switching-power-converter-based topology and control scheme that allows arbitrary adjustment of both the amplitude and frequency of the output voltage waveform. While a transformer-based configuration was introduced in a previous digest, this paper presents a new, simpler, and more efficient topolo-gy that does not require a transformer. Using a prototype circuit, we demonstrate that a highly linear triangular-wave output can be achieved at approximately 400 kHz.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img data-recalc-dims=\"1\" fetchpriority=\"high\" decoding=\"async\" width=\"676\" height=\"339\" data-attachment-id=\"6175\" data-permalink=\"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?attachment_id=6175\" data-orig-file=\"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=861%2C432&amp;ssl=1\" data-orig-size=\"861,432\" data-comments-opened=\"1\" data-image-meta=\"{&quot;aperture&quot;:&quot;0&quot;,&quot;credit&quot;:&quot;&quot;,&quot;camera&quot;:&quot;&quot;,&quot;caption&quot;:&quot;&quot;,&quot;created_timestamp&quot;:&quot;0&quot;,&quot;copyright&quot;:&quot;&quot;,&quot;focal_length&quot;:&quot;0&quot;,&quot;iso&quot;:&quot;0&quot;,&quot;shutter_speed&quot;:&quot;0&quot;,&quot;title&quot;:&quot;&quot;,&quot;orientation&quot;:&quot;0&quot;}\" data-image-title=\"apec2026\" data-image-description=\"\" data-image-caption=\"\" data-large-file=\"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=676%2C339&amp;ssl=1\" src=\"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?resize=676%2C339&#038;ssl=1\" alt=\"\" class=\"wp-image-6175\" srcset=\"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?w=861&amp;ssl=1 861w, https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?resize=300%2C151&amp;ssl=1 300w, https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?resize=768%2C385&amp;ssl=1 768w, https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?resize=600%2C301&amp;ssl=1 600w\" sizes=\"(max-width: 676px) 100vw, 676px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>The Applied Power Electronics Conference&#8230; <a class=\"more-link\" href=\"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?p=6177\">Continue Reading &rarr;<\/a><\/p>\n","protected":false},"author":1,"featured_media":6285,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_newsletter_access":"","_jetpack_dont_email_post_to_subs":false,"_jetpack_newsletter_tier_id":0,"_jetpack_memberships_contains_paywalled_content":false,"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[5],"tags":[115,114,102],"class_list":["post-6177","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-presentations","tag-common-mode-noise","tag-flyback","tag-magnetics"],"jetpack_featured_media_url":"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/20260326_124523-scaled.jpg?fit=2560%2C1920&ssl=1","jetpack_sharing_enabled":true,"jetpack_shortlink":"https:\/\/wp.me\/p6WRmG-1BD","jetpack-related-posts":[{"id":6174,"url":"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?p=6174","url_meta":{"origin":6177,"position":0},"title":"(Withdrawn) Presentation: Shen &#8220;T27.2 &#8211; High-Fidelity Modeling of Dynamic Magnetic Components for Power Electronics with Double-Pulse Testing, Automated Circuit Simulation and Deep Learning&#8221;, Mar. 26, 2026 in IEEE Applied Power Electronics Conference 2026 @San Antonio, Texas, USA","author":"","date":"01\/28\/2026","format":false,"excerpt":"The Applied Power Electronics Conference (APEC) 20\u2026","rel":"","context":"Presentations","block_context":{"text":"Presentations","link":"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?cat=5"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=861%2C432&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=861%2C432&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=861%2C432&ssl=1&resize=525%2C300 1.5x, https:\/\/i0.wp.com\/pemsic.eee.nagasaki-u.ac.jp\/wp-content\/uploads\/2026\/01\/apec2026.png?fit=861%2C432&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":893,"url":"https:\/\/pemsic.eee.nagasaki-u.ac.jp\/?p=893","url_meta":{"origin":6177,"position":1},"title":"Full Paper: Static Characteristic Analysis of Proposed Bi-Directional Dual Active Bridge DC-DC Converter","author":"","date":"09\/01\/2015","format":false,"excerpt":"*This jounal is\u00a0Open Access Journal. 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